| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic acceleration sensor which is low-cost and has a superior sensitivity. SOLUTION: Variable capacitance parts Cx+, Cx-, Cy+, Cy- and Cz+ are constituted of a group of fixed electrodes Dx+, Dx-, Dy+, Dy- and Dz+ formed to a substrate 1 and, a movable electrode 2 formed of an elastic conductive rubber or conductive resin. When an acceleration acts, the conductive rubber or conductive resin is deformed or moved by inertia, thereby changing a capacitance of the variable capacitance parts Cx+, Cx-, Cy+, Cy- and Cz+. |
