| 摘要 |
PROBLEM TO BE SOLVED: To obtain a high reliable distortion detection sensor allowing reduction of a defect in conductivity of a shield film in a contact part, and allowing suppression of an aging effect on an output. SOLUTION: In this distortion detection sensor, a shield film 6a is sandwiched between a contact part 5a made of a metal such as aluminum and an insulating film (layer) 20 to prevent thinning, cutting due to a step, a defect in conductivity, or the like of the shield film 6a in the step between the contact part 5a and the insulating film 20. Thereby, high reliability of connection can be secured, and stability of electric potential that is a function of the shield film 6a can be certainly brought out. The distortion detection sensor can have a structure difficult to oxidize in an assembling process and in a surrounding atmosphere by disposing an insert material 61a between the shield film 6a and the insulating film 20 to make the shield film 6a a two-layer structure, and by using a material difficult to oxidize, such as Au, Pt, or the like for the front face side of the shield film 6a.
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