发明名称 TREATING EQUIPMENT AND TREATING METHOD
摘要 PROBLEM TO BE SOLVED: To provide treating equipment, capable of miniaturization and simplification of the equipment in the treating equipment treating an object to be treated by using a treatment liquid. SOLUTION: In this treating equipment which treats an object to be treated by using treating liquid, a treating tank 21 capable of storing the treating liquid inside, a circulating pipe 25 circulating the treating liquid stored in the treating tank and treating the object to be treated which is supplied in the treating tank 21, a drain pipe 24 discharging the treating liquid which is deteriorated by use from the treating tank, an adjusting tank 32 storing the treating liquid which is adjusted according to use conditions and not yet used, and a supply pipe 29 supplying the treating liquid which is stored in the adjusting tank and yet to be used to the treating tank, when the used treating liquid is discharged from the treating tank by the drain pipe are installed.
申请公布号 JP2000223462(A) 申请公布日期 2000.08.11
申请号 JP19990020100 申请日期 1999.01.28
申请人 SHIBAURA MECHATRONICS CORP 发明人 YAMAZAKI TAKAHIRO
分类号 H01L21/304;(IPC1-7):H01L21/304 主分类号 H01L21/304
代理机构 代理人
主权项
地址