| 摘要 |
PROBLEM TO BE SOLVED: To permit easy attachment of a cleaner without attending alignment with a line of probe terminals by arranging a support in the direction of a plurality of abrasive paper stacked and supporting each of the abrasive papers with a scribed gap. SOLUTION: A cleaner 31 comprises an abrasive paper 31A coated with abrasive particles, and a support 31B that is arranged in the direction of a plurality of the abrasive paper 31A stacked and supports each of the abrasive papers 31A with a prescribed gap. Accordingly, when the cleaner 31 is attached to a stage, it is not necessary to pay attention to alignment of the abrasive papers with a line of probe needles 21A. Since average grain size of the abrasive grains on the abrasive papers 31A is adjusted so as to become smaller than the outer diameter of the probe needle 21A, the point of the probe needle 21A is not damaged by the abrasive grains. As a result, the cleaner 31 can be easily attached without attending alignment with a line of probe terminals. In addition, a cleaning mechanism of the cleaner 31 can be reduced with cost.
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