| 摘要 |
PROBLEM TO BE SOLVED: To produce an integrated sensor array of good quality with good controllability and reproducibility. SOLUTION: A sensor array having individually different responsive surfaces is produced by using a lift-off technique and a shadow mask technique at the same time. A resist layer 13 having an aperture part 12 is formed to all of regions 11 to be coated by the lift-off technique. A shadow mask 15 is utilized, in order to hold a window 14 only to the aperture part where deposition for a certain specific coating is performed. Thereafter, coating is applied to the region where the aperture part 21 of the resist layer and the window 14 of the shadow mask 15 are present. The shadow mask 15 is moved to a region where deposition is performed next, and the procedure thereof is repeated until all of coatings are completed. |
