| 摘要 |
PROBLEM TO BE SOLVED: To provide a small device for analyzing a surface by loading a large sample on a sample stage as it is, by providing a rear-stage reflection electrode on an ion track in order to guide ions ejected from an ion reflector to a detector. SOLUTION: Laser beams going out of a laser beam source 3 are reflected by a mirror 6 having a through hole, and are focused onto a sample 2 by an objective lens 5. Ions generated with irradiation are accelerated by an ion drawing electrode 8, and are guided to this flight-time-type mass spectrometer 1. A polarization electrode 11 is adjusted so as to direct a progressing direction of the ions to an ion reflector (reflectron) 9. The ions reflected by the reflectron 9 are reflected by a rear-stage reflection electrode 40, and focused by an ion lens 41, and are detected by an ion detector 10. Masses are determined by measuring a time required from laser oscillation to arrival at the ion detector 10. By reflecting the ions with the rear-stage reflection electrode 40, the detector 10 can be placed at a position away from a sample container 20, and measurement of a large sample is allowed. |
