| 摘要 |
PROBLEM TO BE SOLVED: To prevent reaction byproducts from adhering to the lower section of a reaction furnace and acting as a particle source by making an opening for passing radiation heat from a heater in a port receiver thereby preventing the temperature at the lower section of the reaction furnace from decreasing. SOLUTION: An SiC plate having high thermal capacity is laid removably on the upper surface of a seal flange (bottom face of a reaction furnace) constituting the bottom part of a reaction furnace. A port receiver 7 has a substantially cross-shaped plan view provided with cuts (openings) 7a at four points of a disc. The cut 7a has a maximum size where the end part of a flange base does not project in the plan view and radiation heat generated above the port receiver 7 is passed through the openings 7a to a seal flange beneath the port receiver 7.
|
