发明名称 EVALUATING METHOD FOR ELECTRON EMISSION ELEMENT AND DEVICE THEREFOR
摘要 <p>PROBLEM TO BE SOLVED: To speedy and highly reliably estimate a service life by providing a light intensity measuring process for determining strength of electro-luminescence light, and estimating variation of element current based on time variation of impressed voltage and a cracking interval. SOLUTION: After pressure and temperature in a vacuum container 102 are measured, an SCE element 101 is driven by a driving circuit 108, and element voltage Vf and element current If are measured. After detection of spectrum light by a light detector 114, activating energy Ee and surface temperature T of the SCE element 101 are measured, and a proportional constant (a) is derived from equation I (where Ts is substrate temperature). Impressed voltage Vf is varied, the element current If is measured and is substituted for an equation IV (where a0 is a constant, D is voltage impression length, and (b) is a coefficient), the voltage impression D and the constant a0 are derived. Then, after organic partial pressure is decreased by exhausting gas with a pump 104, the voltage Vf is impressed between element electrodes, the element current If and the surface temperature T are measured, and a coefficient W0 is derived. Life of this SCE element can be estimated from these parameters and equations I-IV.</p>
申请公布号 JP2000223007(A) 申请公布日期 2000.08.11
申请号 JP19990019087 申请日期 1999.01.27
申请人 CANON INC 发明人 OKUDA MASAHIRO
分类号 H01J9/42;H01J1/316;H01J9/02;(IPC1-7):H01J1/316 主分类号 H01J9/42
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