| 摘要 |
PROBLEM TO BE SOLVED: To quickly change a preheating temp. to a lower temp. by providing air-cooling means having a humidifying means on a hot plate. SOLUTION: A heating means 3 heats a hot plate 2 via a controller 6 to control the heating means 3, based on detected signals from a temp. sensor 12, thereby holding the hot plate 2 at a specified temp. For lowering a preheating temp., the heating means 3 is set off, a pump 14 is driven, a flow control valve 25 is opened, and a preset humidified compressed air flows in a fluid passage 10 via a feed pipe 13 to quickly cool the hot plate 2. Based on a detection signal from a temp. sensor 12, a controller 6 conducts control so that a semiconductor 9 has a changed preheating temp. The heat-exchanged humidified compressed air is discharged from an exhaust pipe 26, and the feed rate of water from the pump 14 is set at a level such that the water does not flow out as water drops from the exhaust pipe 26.
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