| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron beam tester capable of testing an electric component with a simple structure and accurately positioning it in a short time in measuring a voltage waveform, and a test method for it. SOLUTION: This electron beam tester is equipped with an electron gun 16 to generate an electron beam, a chopping aperture 21 having an aperture part formed on it, a deflector 19 to deflect the electron beam, a pulse generation control part 22 to generate a pulse beam having a pulse width of a designated time by continuously passing the electron beam from the aperture part for a designated time by controlling the deflection of the electron beam by the deflector 19, a control part 23 for the number of generated pulses to generate a pulse beam having designated plural pulses, an irradiation control part 27 to continuously irradiate the designated plural pulses of the pulse beam onto the designated position of an electric component 12, a detecting part 36 to detect the quantity of a secondary electron generated, and a processing part 42 to carry out a designated process based on the quantity of the secondary ion.
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