| 摘要 |
PROBLEM TO BE SOLVED: To increase adhesion property between a transparent resin substrate and a transparent dielectric layer and to obtain a higher Kerr rotation enhancement effect by successively laminating an optical recording layer and a reflection layer on a transparent resin substrate, and forming a transparent dielectric layer consisting of SiaCbOcNd on at least one interface of the optical recording layer. SOLUTION: A first transparent dielectric layer 2 and a second transparent dielectric layer 4 consists of SiaCbOcNd (wherein a=37 to 47 atom.%, b=3 to 9 atom.%, c=6 to 18 atom.% and d=26 to 54 atom.%, satisfying a+b+c+d=100 atom.%). By mixing a rather small proportion of C and O to Si in this structure, the production of SiNx can be suppressed, and C, O on the surface of the transparent resin substrate and Si, C, O in the transparent dielectric layer make covalent bonds to improve the adhesion property. The first transparent dielectric layer 2 and the second transparent dielectric layer 4 are formed by using a target essentially comprising Si and by a reactive sputtering method in a mixture gas of CO2 and N2. |
