| 摘要 |
PROBLEM TO BE SOLVED: To make it possible to fill liquid crystal without allowing air to back- flow to the internal space of a liquid crystal cell and without moving spacers. SOLUTION: A control means 27 opens a filling valve 18, a filling side exhaust valve 34 and a defoaming valve 35 and executes defoaming of the liquid crystals in a tank 15 by a filling side vacuum pump 31 in a defoaming mode. In the next exhaust mode, the control means opens a filling port valve 36 and the filling side exhaust valve 34, executes vacuum suction by the filling side vacuum pump 31 and executes vacuum suction by an exhaust side vacuum pump 25 via an exhaust side exhaust valve 23. In the subsequent first liquid crystal filling modes t5 to t7, the liquid crystals are pressure filled in a pressure range where the bulging of the substrates of the liquid crystal cell does not occur. In the second liquid crystal filling modes t7 to t8, the absolute value of the negative pressure on the exhaust port side is made successively smaller to gradually increase the pressure of the exhaust port toward an outdoor air pressure. In the third liquid crystal filling modes t8 to t9, the pressures of the liquid crystals in the filling port and the exhaust port are held under the outdoor air pressure as it was.
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