| 摘要 |
PROBLEM TO BE SOLVED: To obtain a high resolution in whole view field of a detector regardless of the shape of specimen. SOLUTION: A plurality of two-dimensional radiation detectors 5 are used, stood facing to a specimen 2 near to each other and moved in the direction approaching to and leaving from the specimen 2 independently so as to fit in the shape of the outline of the specimen and rotated around the specimen. The distance of each detector 5 to the specimen 2 is so constituted as to be shorter than the case a conventional large detector is used.
|
