CAPACITOR OF ILLUMINATOR FOR LITHOGRAPHY, AND CONSTITUTION METHOD

摘要

PROBLEM TO BE SOLVED: To supply necessary irradiation, covering a predetermined field of vision, with required irradiation and angle distribution and irradiation intensity, by making an illumination source have a first reflection type fly eye having a plurality of facets positioned in advance and a second reflection type fly eye. SOLUTION: The electromagnetic waves reflected from a first reflection type fly eye or a mirror array 16 are collected by a second reflection type fly eye or a second mirror array 18. The first reflection type fly eye or the mirror array 16 has many reflection type of elements or mirrors. These reflection type elements or mirrors are used to form many source images in the vicinity of the corresponding facet within the second reflection type eye or the second mirror array 18. The electromagnetic waves reflected from the second reflection type fly eye or the mirror array 18 are relayed to an image plane or an illumination field 24 by the first reflection type optical element 20 and the second reflection type of optical element 22.