| 摘要 |
PROBLEM TO BE SOLVED: To relieve load in the action of a carriage robot and aim at downsizing of a board processor, the reduction of the quantity of consumed inert gas, etc., for the substrate processor becomes large and the load in the action of the carriage robot becomes large, if a substrate storage, a positioning part, a processing part, and a cooling part are arranged around the carriage robot. SOLUTION: A positioning part 130, a processing part 160, and a cooling part 140 are arranged around a carriage robot 150, and a transfer robot 120 is provided between a substrate storage 110 to store a board 9 in a carrier 81 and the positioning part 130 and the cooling part 140. Hereby, the load in action of the carriage robot 150 can be relieved. Moreover, it can be made an arrangement with small dead space by arranging the substrate storage 110, the transfer robot 120, the positioning part 130, the cooling part 140, the carriage robot 150, and the processing part 160 on a roughly straight line, so the substrate processor 100 can be downsized. |
