COMPOSITE MEMBER AND ITS ISOLATION METHOD, LAMINATED SUBSTRATE AND ITS ISOLATION METHOD, RELOCATION METHOD OF RELOCATION LAYER, AND METHOD FOR MANUFACTURING SOI SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To appropriately separate a laminated substrate consisting of first and second substrates with a porous layer. SOLUTION: A laminated substrate 30 with a projection part where the outer-periphery end of a first substrate 10 projects from the outer-periphery end of a substrate 20 is created by gluing the first substrate 10 with a porous layer inside and a single-crystal Si layer and an insulation layer on it to the second substrate while the center positions are shifted each other. Then, an isolation start part 40 is formed by first injecting a fluid toward the projection part and then isolation is started from the isolation start part 40 while rotating the laminated substrate 30.