发明名称 |
MICRO MANIPULATION DEVICE FOR FINE WORK AND MICRO PROBE FOR FINE WORK |
摘要 |
PROBLEM TO BE SOLVED: To provide a micro manipulation device and a micro probe for the microfabrication of a microscope by which a processing part is precisely specified and made easy to be observed as a microscope image and extremely fine sample processing is easily executed in an optimum processing direction. SOLUTION: This micro manipulation device for microfabrication is constituted as follow. An inspection processing sample stage 2 which is used for placing an inspection processing sample 3 and which can be optionally moved in an X axis direction and in a Y axis direction and driven to be rotated with the optical axis A-A' of a microscope 10 as a rotation center is installed on a movable base 1 which can be optionally moved in the X axis direction and in the Y axis direction and driven to be inclined and rotated with the B-B' axis of the surface of the sample 3 as a rotation center. Besides, a manipulator base 5 on which a manipulator driving unit 7 is loaded through a manipulator base supporting body 4 and which can be driven to be rotated with the optical axis A-A' of the microscope 10 as a rotation center is installed on the base 1. Then, the probe for fine work is fitted to the tip of the unit 7.
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申请公布号 |
JP2000221409(A) |
申请公布日期 |
2000.08.11 |
申请号 |
JP19990025155 |
申请日期 |
1999.02.02 |
申请人 |
SANYU SEISAKUSHO:KK;YAMAMOTO YOSHIO |
发明人 |
KATOGI KATSUYA;KAWAKAMI TATSUO;YAMAMOTO YOSHIO;EDA HIROSHI |
分类号 |
B25J7/00;G02B21/00;G02B21/32;(IPC1-7):G02B21/32 |
主分类号 |
B25J7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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