发明名称 WAVELENGTH MONITOR AND LASER LIGHT SOURCE DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To provide a wavelength monitor accurately monitoring the wavelength of a light source and a laser light source using the wavelength monitor. SOLUTION: An incident light from a light source is branched with a beam sampler 11, and two branch lights whose angles are slightly different are obtained. By making the branch lights enter an etalon 13, characteristics wherein phases of wavelength-transmittance characteristics are different from each other are obtained. Wavelength-transmittance characteristics are normalized, and the wavelength changing amount from a reference wavelength is calculated by using wavelength-transmittance curves excellent in mutual linearities. Transmission lights of the beam sampler 11 are branched with a beam sampler 12, and other two branch lights are obtained. The branch lights are directly received via a slope filter 18, and a reference wavelength of an incident light is obtained from wavelength-transmittance of the slope filter 18. The reference wavelength and the wavelength changing amount are added, and an accurate wavelength of the incident light is obtained.</p>
申请公布号 JP2000223761(A) 申请公布日期 2000.08.11
申请号 JP19990025826 申请日期 1999.02.03
申请人 SUN TEC KK 发明人 IGAMI TAKESHI
分类号 H01S3/10;H01L31/12;H01S3/137;(IPC1-7):H01S3/10 主分类号 H01S3/10
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