| 摘要 |
PROBLEM TO BE SOLVED: To easily and inexpensively attach a gel substance when the gel substance is used for the elastic support system of a biaxial actuator to suppress resonance vibration. SOLUTION: A biaxial actuator 1 is composed of a movable part 4 having an objective lens 2 and a print coil 3, and a biaxial holder 6 made of a fixed part and a heating member for movably supporting the movable part 4 via supporting members 5a, 5b, 5c and 5d. The biaxial actuator 1 is provided with damper materials 9a, 9b, 9c and 9d attached to the supporting members 5a, 5b, 5c and 5d and made of gel substances heated to be thermally set by heat generated by the electromagnetic induction of the biaxial holder 6.
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