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发明名称
Anordnung zum Verhindern von Überschlägen in einem Plasma-Prozeßraum
摘要
申请公布号
DE4239218(C2)
申请公布日期
2000.08.10
申请号
DE19924239218
申请日期
1992.11.21
申请人
BALZERS UND LEYBOLD DEUTSCHLAND HOLDING AG
发明人
STUERMER, JOHANN;LUEBBEHUSEN, MICHAEL;THORN, GERNOT
分类号
H01J37/34;H05H1/36;(IPC1-7):H05H1/36;C23C16/50
主分类号
H01J37/34
代理机构
代理人
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