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发明名称
Thermal mass flow sensor with imprived sensitivity and response time
摘要
申请公布号
GB0014475(D0)
申请公布日期
2000.08.09
申请号
GB20000014475
申请日期
2000.06.15
申请人
MKS INSTRUMENTS,INC.
发明人
分类号
G01F1/684;G01F5/00
主分类号
G01F1/684
代理机构
代理人
主权项
地址
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