发明名称 |
Laser oscillating apparatus, exposure apparatus using the same, and device fabrication method |
摘要 |
<p>In a laser oscillating apparatus for exciting a laser gas in a laser tube by introducing an electromagnetic wave from a waveguide (1) into the laser tube (2) through a plurality of slots (10) formed in a waveguide wall, and generating a laser beam by resonating light emitted from the laser gas, the slots (10) are formed in a line such that their longitudinal direction is consistent with the longitudinal direction of the waveguide (1), and a metal wall (12) is so formed as to surround these slots. This metal wall (12) forms a gap as a microwave passage from the slots (10) to a window (15) in the laser tube wall, thereby spacing the laser tube wall apart from the slots (10) by a predetermined distance. <IMAGE></p> |
申请公布号 |
EP1026796(A2) |
申请公布日期 |
2000.08.09 |
申请号 |
EP20000300719 |
申请日期 |
2000.01.31 |
申请人 |
TADAHIRO OHMI;CANON KABUSHIKI KAISHA |
发明人 |
OHMI, TADAHIRO;SUZUKI, NOBUMASA;TANAKA, NOBUYOSHI;HIRAYAMA, MASAKI;OHSAWA, HIROSHI;SHINOHARA, TOSHIKUNI |
分类号 |
G03F7/20;H01S3/03;H01S3/225;(IPC1-7):H01S3/097;H01L21/027 |
主分类号 |
G03F7/20 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|