MoSi2-based heating element and method for manufacturing the same

摘要

There is provided an MoSi2-based heating element having improved durability, and a method for inhibiting the formation of defects during the processes for manufacturing such an MoSi2-based heating element. The MoSi2-based heating element is a heating element containing 70% or more MoSi2 in which the difference between the average density of the entire heating element and the density of the central portion corresponding to one fifth of the diameter of the heating element (true density ratio) is 5% or less, preferably 3% or less. In the process of temporary sintering, sintering is performed in a temperature pattern of an adequately adjusted temperature raising rate. <IMAGE>