| 摘要 |
PROBLEM TO BE SOLVED: To shorten a time for positioning a sample in a punching device which punches many holes continuously out of the sample. SOLUTION: When a rough movement table 7 moves at a constant speed, a control computer 1 operates a punch 18 to form a via hole in a ceramic green sheet 13 in the case a measured value which is measured by a laser type displacement gauge 15 coincides with a target value. During this period, a displacement of a piezoelectric element 10 is controlled so as to make the target value and the measured value coincide with each other. The rough movement table 7 which is large in mass and long in positioning time is only moved to the desired value and is not subjected to positioning, and a fine movement table 11 which is small in mass is subjected to positioning by the piezoelectric element 10 which is large in generating force and high in responsiveness, and a positioning time is thereby considerably shortened.
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