| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent accumulation of contaminants at a processed part of a workpiece member. SOLUTION: This laser device for processing a work while laser lights oscillated from an excimer laser oscillator 1 are radiated on a processed face of a work (member to be processed), is equipped with a gas supplying device 10 and a gas spraying nozzle 18 for spraying nitrogen gas near the processed face of the work, and a vacuum device 11 and a vacuum nozzle 19 for vacuuming gas such as air near the processed face of the work. When the laser lights are radiated on the processed face of the work, nitrogen gas is sprayed near the processed face of the work, or gas near the processed face is vacuumed, so as to generate an airflow near the processed face of the work.</p> |
