| 摘要 |
PROBLEM TO BE SOLVED: To improve homogeneity of surface treatment by bringing an integrated amt. of ultraviolet rays to the surface of an article to be treated close to const. in an ultraviolet rays irradiation apparatus for irradiating the article to be treated with ultraviolet rays while it is relatively rotated to a dielectric barrier discharge lamp. SOLUTION: This apparatus is provided with a turn table 16 for placing an article W to be treated, a driving source 18 for rotatably driving the turn table 16 and a filter 15 for adjusting amt. of ultraviolet rays reaching the surface to be treated of the article W to be treated based on the shape of the ultraviolet rays passing region. As this filter 15, a filter wherein the shape of the ultraviolet rays passing region is symmetric to the central line to the length direction in the irradiation range of the ultraviolet rays and at least a part close to the center of the ultraviolet rays irradiation range of each of lines forming the boundary of the ultraviolet rays passing region in the width direction of the ultraviolet rays passing region can be approximately expressed with a second-order curve using a distance in the length direction in the ultraviolet rays irradiation range using the central line as a base point as a variable, is provided.
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