Wafer aligning apparatus for semiconductor device fabrication

摘要

A wafer aligning apparatus for semiconductor device fabrication includes a cassette support on which is mounted a cassette holding wafers immersed in a non-conducting fluid. A guide roller is composed of carbon fiber reinforced polyether and rotates in contact with circumferential edges of the wafers. A wafer support holds the wafers apart from the roller when flat zones of the wafers are aligned with the wafer support