| 摘要 |
PROBLEM TO BE SOLVED: To prevent damage of a disc member at delivery in a handling chuck device to deliver the disc member held by a hand of a handling mechanism to a spindle. SOLUTION: An upper guide 8 having a lower surface 8a in parallel with a disc member 4 held by a hand 2 is provided on the side of a handling mechanism, a lower guide 9 having an upper surface 9a in parallel with a flange surface 6b of a spindle 6 is provided on the side of a chuck mechanism, and holding of the disc member 4 is released in such a state where the lower surface 8a of the upper guide 8 is respectively made contact with the upper surface 9a of the lower guide 9 when installing the disc member 4 on the spindle 6. Consequently, as the disc member 4 makes contact with the spindle 6 in parallel with the flange surface 6b and no breakage is caused.
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