| 发明名称 |
Pressurized cleaning of developer dispenser nozzles |
| 摘要 |
Clogged openings of a developer dispenser nozzle are unclogged utilizing a pressurized gas, such as nitrogen. An embodiment includes passing a solution of alcohol and water under gas pressure through the developer dispenser nozzle to unclog the nozzle openings.
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| 申请公布号 |
US6098640(A) |
申请公布日期 |
2000.08.08 |
| 申请号 |
US19970827706 |
申请日期 |
1997.04.08 |
| 申请人 |
ADVANCED MICRO DEVICES, INC. |
发明人 |
NGUYEN, NIEM D.;VO, LOC |
| 分类号 |
C11D7/50;C11D11/00;(IPC1-7):B08B5/00 |
主分类号 |
C11D7/50 |
| 代理机构 |
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代理人 |
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| 地址 |
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