Surface acoustic wave filter employing A1N/A1N:H/A1N tri-layered film and a process for fabricating the same

摘要

The present invention provides a novel surface acoustic wave (SAW) filter having a high propagation velocity and electromechanical coupling coefficient (k2) employing A1N/A1N:H/A1N tri-layered film where both sides of A1N:H film are deposited with A1N film to protect the film from vapor, and a process for fabricating the same.