| 摘要 |
PROBLEM TO BE SOLVED: To automatically judge the abnormality of a device by operating the difference of detection values of a pair of flow meters, comparing the result of the operation with a predetermined allowable value, and judging the abnormality of the device when the result of the operation is over the allowable value. SOLUTION: A flow rate E of the slurry flowing in a slurry feed piping 64 is detected by a second flow meter 66. A flow rate F of the slurry flowing in a slurry recovering pipe 38 is detected by a third flow meter 68. Then the difference G (absolute value) between the detected flow rates E, F is operated. The operated value G is compared with a predetermined allowable value H (set by an operator on the basis of the past operation data and the like). When the operated value G is over the allowable value H (in a case of G>=H), the abnormality of the device (clogging of the slurry feed piping 63 and the slurry recovering pipe 38) is informed to an operator by the lighting of a warning lamp or by a buzzer. |
