| 摘要 |
PROBLEM TO BE SOLVED: To make a working fluid supply device for supplying a working fluid to the cut part of a wire saw to light and compact, in the wire saw for cutting an ingot to a wafer. SOLUTION: A collection pump 66 is used as a stirring device commonly by switching and operating the collection pump 66 provided on the working fluid collection tank 40 of a wire saw to the working fluid supply mode with a high number of rotation and a working fluid stirring mode with a low number of rotation. When the operation of the collection pump 66 is switched to the working fluid supply mode, the number of rotation of the collection pump 66 becomes high and the working fluid of the working fluid collection tank 40 is sent to a processing liquid tank 46. When the operation of the collection pump 66 is switched to the working fluid stirring mode, the number of rotation becomes low and the supply of the working fluid is stopped and the working fluid is stirred by the impeller 67 and stirring blade 97. |
