发明名称 |
Article comprising an inductor |
摘要 |
An article comprising a micro-machined, passively self-assembling inductor is disclosed. The inductor is fabricated using MEMS technology and advantageously utilizes materials compatible with CMOS such that inductor is monolithically integrable with a CMOS chip. The inductor includes passive self-assembly means by which the inductor loop is moved away from an underlying substrate, typically silicon, in the final steps of inductor assembly. Such passive self-assembly does not require separate actuation or monitoring steps.
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申请公布号 |
US6101371(A) |
申请公布日期 |
2000.08.08 |
申请号 |
US19980152189 |
申请日期 |
1998.09.12 |
申请人 |
LUCENT TECHNOLOGIES, INC. |
发明人 |
BARBER, BRADLEY PAUL;BELK, NATHAN;BISHOP, DAVID J.;GAMMEL, PETER L. |
分类号 |
B81C1/00;H01F17/00;H01F27/06;H01L21/02;H01L27/08;(IPC1-7):H04B1/38;H04B5/00 |
主分类号 |
B81C1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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