发明名称 ELECTRIC DIALYZER FOR REGENERATION TREATMENT OF PHOTORESIST DEVELOPMENT WASTE LIQUID
摘要 PROBLEM TO BE SOLVED: To control the foaming of an electrode liquid and to operate stably for a long period in circulating use by installing a line equipped with a photoresist removing device and a defoaming device in an electrode liquid circulating line for circulating-use at least part of at least an anode liquid of both electrode liquids in an electric dialyzer. SOLUTION: A concentration chamber and the stack part 1 of a desalting chamber for electric dialysis have an anode chamber 2 and a cathode chamber 3 on both sides, these are connected to an anode liquid tank 5 and a cathode liquid tank 7 through a photoresist removing device and/or deforming devices 4, 6, and each pump P is installed. The photoresist removing device and/or the deforming devices 4, 6 are installed in the main line of an electrode liquid circulating line. In an electrode liquid tank, the circulating line, and others, the generation of a phenomenon in which an electrode liquid absorbs outside air and a gas generated by an electrode reaction to be foamed can be controlled substantially. Accordingly, various troubles caused by the foaming of the electrode liquid can be prevented to materialize the safe operation of an electric dialyzer.
申请公布号 JP2000218136(A) 申请公布日期 2000.08.08
申请号 JP19990021466 申请日期 1999.01.29
申请人 JAPAN ORGANO CO LTD 发明人 SUGAWARA HIROSHI
分类号 B01D61/44;B01D19/00;B01D61/46;B01D61/52;B01J47/04;C02F1/42;C02F1/469;G03F7/30;(IPC1-7):B01D61/46 主分类号 B01D61/44
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