发明名称 |
Apparatus for processing a substrate providing an efficient arrangement and atmospheric isolation of chemical treatment section |
摘要 |
An atmospheric conditioning unit for supplying temperature- and humidity-controlled air to a chemical processing part (spin coater) is arranged immediately above a chemical processing part, between this chemical processing part and a heat treatment part (including a hot plate and a cool plate). Namely, the chemical processing part, the atmospheric conditioning unit and the heat treatment part are vertically arranged in a stacked manner. The atmospheric conditioning unit receives external air from an opening. A closed partition is provided to block air flow between the atmospheric conditioning unit and a transport area. The temperature- and humidity-controlled air supplied from the atmospheric conditioning unit to the spin coater forms a downflow in the spin coater, and thereafter rises through an opening and joins with the air flowing from the opening, to be introduced into the atmospheric conditioning unit again and reused.
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申请公布号 |
US6099643(A) |
申请公布日期 |
2000.08.08 |
申请号 |
US19970993284 |
申请日期 |
1997.12.18 |
申请人 |
DAINIPPON SCREEN MFG. CO., LTD. |
发明人 |
OHTANI, MASAMI;MATSUNAGA, MINOBU;UEYAMA, TUTOMU;KITAKADO, RYUJI;AOKI, KAORU |
分类号 |
H01L21/00;(IPC1-7):B05C13/00 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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