发明名称 |
Purified alkoxide and process for purifying crude alkoxide |
摘要 |
A purified alkoxide from which volatile impurities causing polymerization and degradation of the alkoxide are removed to extremely low concentrations. The purified alkoxide can be obtained by distilling a crude alkoxide and stripping the distilled liquid alkoxide by applying ultrasonic vibration while passing an inert gas through the liquid alkoxide. A high quality thin insulating film excellent in flatness with few defects such as voids can be obtained by using the purified alkoxide of the present invention as a CVD material.
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申请公布号 |
US6100415(A) |
申请公布日期 |
2000.08.08 |
申请号 |
US19990267791 |
申请日期 |
1999.03.15 |
申请人 |
JAPAN PIONICS CO., LTD. |
发明人 |
TAKAMATSU, YUKICHI;YONEYAMA, TAKEO;ISHIHAMA, YOSHIYASU |
分类号 |
C07F7/00;C07F7/04;(IPC1-7):C07F9/00;C07F5/06 |
主分类号 |
C07F7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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