| 摘要 |
PROBLEM TO BE SOLVED: To provide a position detecting method in which a detected position can be precisely compensated with the use of only one tactile sensor in consideration with an affect caused of thermal expansion for every section of a ball screw. SOLUTION: In a position detecting system 10, a ball screw 2 is rotated by a motor 1 so as to move a table 3 threadedly engaged with the ball screw 2, and a position of the table is detected by a position detector 4. In this arrangement, the table 3 is mounted thereon with a tactile sensor 5, and a contact jig which is not subjected to affect by a thermal change is located at a position which is previously determined along the travel path of the tactile sensor 5. The tactile sensor 5 is moved as the table 3 is moved, and accordingly, detected positions of the table 3 are compensated in accordance with a position which is detected by the position detector 4 when the contact sensor 5 is made into contact with the contact jig J.
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