| 摘要 |
A bath system having a container with vertical upper sidewalls, a bottom and oblique walls. Each oblique wall joins the bottom to a sidewall, with ends joining the sidewalls, bottom and oblique walls to form an open enclosure for the container. An inlet is mounted to the bottom so that fresh processing liquid pass in a laminar flow over the surfaces of semiconductor wafers held in the container. High power sonic transducers are mounted to the oblique walls to deliver unimpeded sonic energy to the surfaces of the wafers. In operation, the sonic transducers on each oblique wall are multiplexed so that deleterious interference between the sonic waves from the two oblique walls is avoided.
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