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发明名称
摘要
申请公布号
JP3072876(B2)
申请公布日期
2000.08.07
申请号
JP19930253672
申请日期
1993.09.17
申请人
发明人
分类号
H01L21/306;H01L21/00;H01L21/308;(IPC1-7):H01L21/308
主分类号
H01L21/306
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