发明名称 Flow controller
摘要 A control system for digitally monitoring and/or controlling pressure to a pneumatic load such as a stop/suckback valve. Pressure is sensed in the pneumatic fluid input lines to the pneumatic load, and a closed loop control is used to maintain the pressure at a predetermined level. In an alternative embodiment, the control system is used to ensure equal dispensing in multi-point dispense apparatus. Thus, pressure is sensed downstream of each valve in fluid communication with a respective nozzle. Any pressure differential detected is corrected by appropriate valve adjustment.
申请公布号 AU3211900(A) 申请公布日期 2000.08.07
申请号 AU20000032119 申请日期 2000.01.20
申请人 MILLIPORE CORPORATION 发明人 ROBERT F. MCLOUGHLIN;GEORGE L. GONNELLA;TIMOTHY J. KING
分类号 B05D3/00;B05C11/10;G03F7/16;G05D16/20;H01L21/027 主分类号 B05D3/00
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