SYMMETRICAL Z AXIS MICRO GYROSCOPE AND MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A symmetrical z-axis micro gyroscope and a manufacturing method thereof are provided to reduce any manufacturing errors in the vibration resonance frequency and sensing resonance frequency by manufacturing supporting beams with flexibility in an angle of 45 degree with relation to x and y axes, thereby omitting the frequency tuning and improving the performance of the gyroscope. CONSTITUTION: A symmetrical z-axis micro gyroscope includes a supporting die, an inertial mass element(8) vibrating in a floating state above the supporting die, supporting beams, a sensing element for sensing an angula velocity measured by a displacement due to the vibration of the inertial mass element, and an element(15) for generating electrostatic force for vibrating the inertial mass element in parallel with the supporting die, wherein the supporting beams are formed in the structure having a flexibility in the vibration direction and the sensing direction and symmetrically disposed in the vibration and sensing directions.