| 摘要 |
PURPOSE: A system for supplying a developing solution is provided to automatically remove unwanted bubbles in the developing solution. CONSTITUTION: A supply system of a developing solution includes a supplying unit(100) of the developing solution, a filter(110), a sensor(120), a solenoid valve(150), and an air valve(160). The filter(110) is connected to the supplying unit(100) to remove particles and bubbles contained in the developing solution. The sensor(120) is attached to the filter(110) at one end and connected to a power supply(130) at the other end. The sensor(120) is off when the developing solution containing bubbles flows into the filter(110), but is on when the normal developing solution flows into. The solenoid valve(150) is connected to the sensor(120) at one end and an air supply unit(140) at the other end. The solenoid valve(150) is opened to supply air when the sensor(120) is off, but is closed when the sensor(120) is on. The air valve(160) is connected to the filter(110) at one end and the solenoid valve(150) at the other end. The air valve(160) is opened to remove bubbles in the filter(110) when the solenoid valve(150) is opened, but is closed when the solenoid valve(150) is closed.
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