发明名称 APPARATUS FOR EXCHANGING APERTURES
摘要 PURPOSE: An apparatus for exchanging apertures is provided to automatically mount a desired aperture by storing a lot of apertures in a cassette. CONSTITUTION: An apparatus for exchanging apertures comprises a cassette(104) and an aperture conveying element(108). The cassette stores various kinds of apertures, moving vertically and horizontally. The aperture-conveying element selects one of the various apertures, moving vertically and horizontally. The apparatus can exchange a standard aperture(110) mounted in the aperture-conveying element for the selected aperture. A standard aperture is mounted in the aperture-conveying element and can be exchanged for the selected aperture.
申请公布号 KR20000050275(A) 申请公布日期 2000.08.05
申请号 KR19990000003 申请日期 1999.01.02
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 YUK, HEUNG JO
分类号 H01L21/68;(IPC1-7):H01L21/68 主分类号 H01L21/68
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