APPARATUS FOR FIXING POSITION OF WAFER CASSETTE

摘要

PURPOSE: An apparatus for fixing a position of a wafer cassette is provided to prevent a position of the wafer cassette from changing easily under any circumstances, by having the apparatus for fixing a position of the wafer cassette attachable/detachable to a fixed stage of the wafer cassette, and by preventing a position fixing jig of the wafer cassette from changing easily even though excessive power is applied to the position fixing jig from an arbitrary direction. CONSTITUTION: An apparatus for fixing a position of a wafer cassette comprises: at least one wafer cassette fixed stage; a first fixed jig; and a second jig. The at least one wafer cassette fixed stage is established in semiconductor processing facilities. The first fixed jig fixes both sides of the wafer cassette on the wafer cassette fixed stage. The second jig includes a jig body, a combination groove and a screw-coupling element. The jig body has a hexahedral shape. The combination groove installed at a side surface of the jig body is formed to be coupled to a protruded part of the wafer cassette. The screw-coupling element is formed so that screws are not coupled in a straight line on both sides of the combination groove on the basis of the combination groove.