METHOD FOR MANUFACTURING/RECYCLING AMORPHOUS SILICA FILLER USING PIECES OF QUARTZ GLASS

摘要

PURPOSE: A method for manufacturing/recycling an amorphous silica filler, using pieces of quartz glass which is a waste from a semiconductor manufacturing process, is provided to recycle a waste of a melting pot for pulling a silicon monocrystal ingot as a functional material for filling. CONSTITUTION: A method for manufacturing/recycling amorphous silica filler, using pieces of quartz glass which is waste from a semiconductor manufacturing process comprises three steps. The first step is to collect pieces by selecting a kind of waste piece from a group of a waste of a melting pot for pulling a silicon monocrystal ingot and a piece of quartz glass which is a waste from a semiconductor manufacturing process. The second step is to perform a prior treatment to eliminate an impurity from the collected pieces of a waste. The third step is to smash the waste pieces into pieces having a suitable size.