| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an electrostatic chuck made of aluminum nitride which is superior in homogeneity of electrostatic chucking force. SOLUTION: This electrostatic chuck comprises a first substrate 2 composed of an aluminum nitride sintered body, where an electrode layer 3 is formed, a second substrate 4 composed of an aluminum nitride sintered body jointed on the formed plane of the electrode layer of the first substrate 2, and a jointing layer 5 containing yttrium aluminate, which is arranged through between the first substrate 2 and the second substrate 4. In this case, at least two kinds from among the three kinds of aluminum oxide, yttrium oxide, and yttrium aluminate are made to be arranged between the first substrate 2 and the second substrate 4, or more than 0.1 g/cm2 jointing material composed of yttrium aluminate is to be interposed and arranged between the first and the second substrates. Then, the jointing material is caused to melt through heat treatment, while impressing the first substrate 2 and the second substrate 4 at 15 g/cm2 or higher.</p> |
