| 摘要 |
PROBLEM TO BE SOLVED: To provide a stage device which is capable of increasing a suppression (damping) effect of disturbance vibration without being influenced by the movement of the center of gravity of the main body with the movement of a stage. SOLUTION: This stage device is provided with a mask stage 27 which can move at least in the X direction and a linear motor 27A for moving the mask stage. It is also provided with a reaction stage 81 which is different from the mask stage, a linear motor 81A which drives the reaction stage 81 in the direction opposite to the one in which the mask stage is moved with the movement of the mask stage 27, and a controller 11A which executes a feed forward control of the reaction stage 81 through the linear motor 81A.
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