| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain an X-ray fluorescence analyzer whose analytical accuracy can be enhanced by preventing the influence of a substance and an optical element is arranged on an optical path reaching a detector from an X-ray tube. SOLUTION: When an element in a sample S is analyzed, the sample S is first irradiated with primary X-rays B1 which are generated from a target material 3 in an X-ray tube 2. Together with fluorescent X-rays from the element in the sample S, scattered light by the primary X-rays B1 from the target material 3 is incident on respective optical elements 4, 5, 7 in a spectroscopic system. In the respective optical elements 4, 5, 7, rhodium (Rh) which is the same substance as the target material 3 is plated on their surfaces. Fluorescent X-rays B2 are visual-field-limited by the visual-field-limit diaphragm 4 so as to be made parallel by the primary solar slit 5. Only the fluorescent X-rays B2 at a prescribed wavelength which satisfies Bragg's equation by an analyzing crystal 6 are diffracted at an angle of diffractionθwhich is identical to an angle of incidenceθ. Then, diffracted fluorescent X-rays B3 are made parallel by the secondary solar slit 7, and the intensity of the fluorescent X-rays B3 is detected by a detector 8.</p> |
