| 摘要 |
PROBLEM TO BE SOLVED: To allow quick detection by storing the position data outputted from a sensor circuit in sequence, obtaining the difference between the present position data outputted from the sensor circuit and the prediction value calculated by a predicting circuit, and comparing the difference with the prescribed threshold value. SOLUTION: This fault detecting device 13 is constituted of a sensor circuit 120, a predicting circuit 121 and a fault judging circuit 122. The sensor circuit 120 is constituted of a sensor 23 fitted to an actuator device to detect the displacement quantity of the output shaft of a harmonic wave actuator and a sampling circuit 124. The predicting circuit 121 stores multiple position data inputted to the predicting circuit 121 in sequence from the sensor circuit 120 synchronously with the sampling frequency, adds them at weighting factors A1-A5, and calculates the position of an output shaft. The subtractor 130 of the fault judging circuit 122 receives the predicted value outputted from the predicting circuit 121 and the present position measured value outputted from the sampling circuit 124 and obtains a prediction error between the predicted value and the measured value. A comparator 131 outputs a fault signal when the prediction error exceeds a threshold value.
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