| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain a flow rate controller capable of quickly switching flow rate settings and also outputting externally that a flow rate is shifted to a stable state when the flow rate is changed, and to obtain production apparatus utilizing the flow rate controller. SOLUTION: This controller is provided with a control program 59b for remote operation as an inputting means inputting a flow rate set value change instruction from the outside and as an outputting means outputting decision results by a deciding means to the outside and a program 59c for flow rate control state detection as the deciding means which decides that a detection flow rate approaches a set value changed by the flow rate set value change instruction inputted by the inputting means.</p> |
